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Simulation benchmarks of the PIC-MCC codes XPDP1 and VSim for capacitively coupled plasma helium and argon discharges

Authors
Ming-Chieh Lin
Issue Date
18-Jun-2024
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/205336
Place
Beijing, China
Conference Name
The 51st IEEE International Conference on Plasma Science (ICOPS)
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
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