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Phase delta control in EUV phase shift mask to improve NILS and mitigating stochastic effect
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2025-01-26T11:00:26Z | - |
| dc.date.available | 2025-01-26T11:00:26Z | - |
| dc.date.issued | 2025-01-16 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/206342 | - |
| dc.title | Phase delta control in EUV phase shift mask to improve NILS and mitigating stochastic effect | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | nano convergence conference 2025 | - |
| dc.citation.conferencePlace | 대전 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)