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보호판을 이용한 원형 기판의 입자 오염 저감 방안 개발
- Authors
- 육세진
- Issue Date
- 9-May-2025
- Place
- 여수 소노캄호텔
- Conference Name
- 2025 한국기계가공학회 춘계학술대회
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Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
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Related Researcher
- Yook, Se Jin
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)