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Selective Cu Oxide-Inhibitor Interaction for Enhanced Galvanic Corrosion Resistance in Cu/Ru Systems during CMP
- Authors
- 백운규
- Issue Date
- 18-Oct-2024
- Place
- 코엑스
- Conference Name
- 2024년 한국세라믹학회 추계학술대회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)