Deposition of 2D material tin sulfdie thin film using precursor Discrete feeding ALD

전형탁

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Deposition of 2D material tin sulfdie thin film using precursor Discrete feeding ALD

Authors: 전형탁

Issue Date: 11-Nov-2024

URI: https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/208288

Conference Name: KISM 2024

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Appears in Collections: 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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