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Crystallinity Change of Zro2 Thin Film according to Oxygen Radical Density in ICP Rep;ote Plasma ALD
- Authors
- 전형탁
- Issue Date
- 12-Nov-2024
- Conference Name
- KISM 2024
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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