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Results 1-1 of 1 (Search time: 0.002 seconds).
SCIE
SCOPUS
Yield prediction via spatial modeling of clustered defect counts across a wafer map
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Bae, Suk Joo
; Hwang, Jung Yoon; Kuo, Way
Article
Issue Date
2007
Citation
IIE TRANSACTIONS, v.39, no.12, pp.1073 - 1083
Publisher
TAYLOR & FRANCIS INC
1
Discover
Author
Kuo, Way
1
Subject
generalized linear models
1
GENERALIZED LINEAR-MODELS
1
INTEGRATED-CIRCUITS
1
negative binomial regression
1
POISSON REGRESSION
1
spatial clustering
1
STATISTICS
1
wafer map
1
yield
1
zero-inflated poisson regression
1
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