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SCOPUS
Detection of Spatial Defect Patterns Generated in Semiconductor Fabrication Processes
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Yuan, Tao; Kuo, Way;
Bae, Suk Joo
Article
Issue Date
2011
Citation
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.24, no.3, pp.392 - 403
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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Kuo, Way
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Bae, Suk Joo
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Subject
Denoising
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FEATURES
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INFERENCE
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mixture distribution
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MODEL
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principal curve (PC)
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RECOGNITION
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similarity-based clustering
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spatial point process
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spherical shells (SS)
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2011
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IEEE Transactions on Semiconducto...
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