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Results 1-1 of 1 (Search time: 0.307 seconds).
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SCOPUS
Detection of Spatial Defect Patterns Generated in Semiconductor Fabrication Processes
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Yuan, Tao; Kuo, Way;
Bae, Suk Joo
Article
Issue Date
2011
Citation
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.24, no.3, pp.392 - 403
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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Bae, Suk Joo
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2011
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