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Statistical Models of Overdispersed Spatial Defects for Predicting the Yield of Integrated Circuits
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Yuan, Tao;
Bae, Suk Joo
; Kuo, Yue
Article
Issue Date
2020
Citation
IEEE TRANSACTIONS ON RELIABILITY, v.69, no.2, pp.510 - 521
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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Kuo, Yue
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Bae, Suk Joo
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Yuan, Tao
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Clustered defects
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COUNTS
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Dispersion
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hurdle-at-zero (HZ) models
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Integrated circuit modeling
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Manufacturing
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maximum likelihood estimation
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prediction of IC yield
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