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Response to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, DOI: 10.1016/j.matdes.2016.12.066”open accessErratum: Response to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, DOI: 10.1016/j.matdes.2016.12.066” (Materials & Design (2024) 237, (S0264127523008882), (10.1016/j.matdes.2023.112473))

Other Titles
Erratum: Response to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, DOI: 10.1016/j.matdes.2016.12.066” (Materials & Design (2024) 237, (S0264127523008882), (10.1016/j.matdes.2023.112473))
Authors
Lee, GanggyuLee, KangchunMoon, JinokSong, TaeseupLee, Dong-HeePaik, Ungyu
Issue Date
May-2024
Publisher
Elsevier BV
Citation
Materials & Design, v.241, pp 1 - 2
Pages
2
Indexed
SCIE
SCOPUS
Journal Title
Materials & Design
Volume
241
Start Page
1
End Page
2
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/209527
DOI
10.1016/j.matdes.2024.112935
ISSN
0264-1275
1873-4197
Abstract
We would like to respond to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, https://doi.org/10.1016/j.matdes.2016.12.066″. Mangindaan et al. raised concerns about deriving the 2nd order equations for optimizing the W-pattern CMP slurry compositions. However, we clarify that there were no errors in deriving the 2nd order equations obtained by employing response surface methodology using a face-centered design model.
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