Influence of Scavenger on Abrasive Stability Enhancement and Chemical and Mechanical Properties for Tungsten-Film Chemical- Mechanical-Planarization
DC Field | Value | Language |
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dc.contributor.author | Seo, Eun-Bin | - |
dc.contributor.author | Bae, Jae-Young | - |
dc.contributor.author | Kim, Sung-In | - |
dc.contributor.author | Choi, Han-Eol | - |
dc.contributor.author | Kim, Pilsu | - |
dc.contributor.author | Lee, Jong-Chan | - |
dc.contributor.author | Son, Young-Hye | - |
dc.contributor.author | Yun, Sang-Su | - |
dc.contributor.author | Park, Jin-Hyung | - |
dc.contributor.author | Park, Jea Gun | - |
dc.date.accessioned | 2021-07-30T04:54:53Z | - |
dc.date.available | 2021-07-30T04:54:53Z | - |
dc.date.created | 2021-05-11 | - |
dc.date.issued | 2020-07 | - |
dc.identifier.issn | 2162-8769 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/2095 | - |
dc.description.abstract | In tungsten(W)-film chemical-mechanical-planarization(CMP), Fenton reaction between ferric-based-catalyst and oxidant hydrogen peroxide (H2O2) enhances the chemical-oxidation degree of the W-film surface and degrades the abrasive stability of a W-film CMP-slurry as a trade-off effect. The addition of a scavenger (i.e., trilithium citrate tetrahydrate: TCT-Li) in the W-film CMP-slurry improved significantly the abrasive stability. A ionized scavenger (i.e., citrate ions) produced a Fe(III)-citrate complex and chemically reacted with the reactive radicals (i.e., OH•, HO2• and O2•-), depressing Fenton reaction in a ferric-catalyst-based W-film CMP-slurry. Hence, the abrasive stability of the W-film CMP-slurry was improved with the scavenger concentration. In addition, TCT-Li influenced mainly the chemical properties such as the chemical-oxidation degree for the W-film surface and the hydrolysis degree of the SiO2-film surface. Thus, the W-film polishing-rate slightly decreased with the scavenger concentration while the SiO2-film peaked at a specific scavenger concentration (i.e., 0.1-wt%). In addition, two chemical reaction regions were found; i.e., the scavenger-concentration dominant chemical-reaction at the region I (i.e., TCT-Li 0 ∼ 0.1 wt%) and the catalyst [i.e., Fe(NO3)3]-concentration dominant chemical-reaction at the region II (i.e., TCT-Li 0.1 ∼ 0.3 wt%). The region I showed more strongly a chemical-dominant-reaction than the region II, determining the W- and SiO2-film polishing-rate. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELECTROCHEMICAL SOC INC | - |
dc.title | Influence of Scavenger on Abrasive Stability Enhancement and Chemical and Mechanical Properties for Tungsten-Film Chemical- Mechanical-Planarization | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jea Gun | - |
dc.identifier.doi | 10.1149/2162-8777/ab9fe5 | - |
dc.identifier.scopusid | 2-s2.0-85090398714 | - |
dc.identifier.wosid | 000664106600001 | - |
dc.identifier.bibliographicCitation | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, v.9, no.6, pp.1 - 7 | - |
dc.relation.isPartOf | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | - |
dc.citation.title | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | - |
dc.citation.volume | 9 | - |
dc.citation.number | 6 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 7 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | Abrasives | - |
dc.subject.keywordPlus | Addition reactions | - |
dc.subject.keywordPlus | Catalysts | - |
dc.subject.keywordPlus | Chemical polishing | - |
dc.subject.keywordPlus | Economic and social effects | - |
dc.subject.keywordPlus | Iron compounds | - |
dc.subject.keywordPlus | Lithium compounds | - |
dc.subject.keywordPlus | Mechanical properties | - |
dc.subject.keywordPlus | Oxidation | - |
dc.subject.keywordPlus | Silica | - |
dc.subject.keywordPlus | Silicon | - |
dc.subject.keywordPlus | Tungsten | - |
dc.subject.keywordPlus | Chemical oxidation | - |
dc.subject.keywordPlus | Citrate complex | - |
dc.subject.keywordPlus | Fenton reactions | - |
dc.subject.keywordPlus | Ferric catalysts | - |
dc.subject.keywordPlus | Hydrolysis degree | - |
dc.subject.keywordPlus | Reactive radicals | - |
dc.subject.keywordPlus | Scavenger concentration | - |
dc.subject.keywordPlus | Stability enhancement | - |
dc.subject.keywordPlus | Chemical stability | - |
dc.subject.keywordAuthor | AQUEOUS-SOLUTION | - |
dc.subject.keywordAuthor | POLY(ACRYLIC ACID) | - |
dc.subject.keywordAuthor | HYDROGEN-PEROXIDE | - |
dc.subject.keywordAuthor | DEGRADATION | - |
dc.subject.keywordAuthor | COMPLEXES | - |
dc.subject.keywordAuthor | KINETICS | - |
dc.subject.keywordAuthor | SYSTEM | - |
dc.subject.keywordAuthor | CMP | - |
dc.identifier.url | https://iopscience.iop.org/article/10.1149/2162-8777/ab9fe5 | - |
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