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DRIE 기반 선 식각 패턴 형성을 통한 EUV 펠리클 plateau 현상 개선 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2025-12-10T16:32:38Z | - |
| dc.date.available | 2025-12-10T16:32:38Z | - |
| dc.date.issued | 2025-08-11 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/209705 | - |
| dc.title | DRIE 기반 선 식각 패턴 형성을 통한 EUV 펠리클 plateau 현상 개선 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2025 차세대 리소그래피 학술대회 | - |
| dc.citation.conferencePlace | 수원컨벤션센터 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)