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Measurements of electron energy probability function in 2 MHz and 13.56 MHz dual frequency capacitively coupled argon plasma
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-02T15:36:41Z | - |
| dc.date.available | 2021-08-02T15:36:41Z | - |
| dc.date.issued | 2019-02-20 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/21165 | - |
| dc.title | Measurements of electron energy probability function in 2 MHz and 13.56 MHz dual frequency capacitively coupled argon plasma | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제56회 동계정기학술대회 | - |
| dc.citation.conferencePlace | 대명 비발디파크 | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)