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Improving etchability and imaging performance of EUV mask absorber materials via ion implantation (Vol 132, 245, 2026)
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Yunsoo | - |
| dc.contributor.author | Jeong, Dongmin | - |
| dc.contributor.author | Lee, Seungho | - |
| dc.contributor.author | Kim, Bom-Sok | - |
| dc.contributor.author | Kim, Myung-Jin | - |
| dc.contributor.author | Lee, Taeho | - |
| dc.contributor.author | Ahn, Jinho | - |
| dc.date.accessioned | 2026-05-04T06:30:30Z | - |
| dc.date.available | 2026-05-04T06:30:30Z | - |
| dc.date.issued | 2026-04 | - |
| dc.identifier.issn | 0947-8396 | - |
| dc.identifier.issn | 1432-0630 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/212496 | - |
| dc.description.abstract | In this article Jinho Ahn should have been denoted as a corresponding author. The original article has been updated. © The Author(s), under exclusive licence to Springer-Verlag GmbH Germany, part of Springer Nature 2026. | - |
| dc.format.extent | 1 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | SPRINGER HEIDELBERG | - |
| dc.title | Improving etchability and imaging performance of EUV mask absorber materials via ion implantation (Vol 132, 245, 2026) | - |
| dc.title.alternative | Correction: Improving etchability and imaging performance of EUV mask absorber materials via ion implantation (Applied Physics A, (2026), 132, 4, (245), 10.1007/s00339-026-09450-0) | - |
| dc.type | Article | - |
| dc.publisher.location | 독일 | - |
| dc.identifier.doi | 10.1007/s00339-026-09561-8 | - |
| dc.identifier.scopusid | 2-s2.0-105036666920 | - |
| dc.identifier.wosid | 001743621600001 | - |
| dc.identifier.bibliographicCitation | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, v.132, no.5, pp 1 - 1 | - |
| dc.citation.title | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | - |
| dc.citation.volume | 132 | - |
| dc.citation.number | 5 | - |
| dc.citation.startPage | 1 | - |
| dc.citation.endPage | 1 | - |
| dc.type.docType | Correction | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.identifier.url | https://link.springer.com/article/10.1007/s00339-026-09561-8 | - |
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)