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Dependency of tunneling magnetoresistance ratio on Pt seed-layer thickness for double MgO perpendicular magnetic tunneling junction spin-valves with a top Co2Fe6B2 free layer ex-situ annealed at 400 degrees C

Authors
Takemura, YasutakaLee, Du-YeongLee, Seung-EunPark, Jea-Gun
Issue Date
Dec-2016
Publisher
Institute of Physics Publishing
Keywords
Pt seed; p-MTJ; TMR ratio; BEOL
Citation
Nanotechnology, v.27, no.48, pp 1 - 6
Pages
6
Indexed
SCI
SCIE
SCOPUS
Journal Title
Nanotechnology
Volume
27
Number
48
Start Page
1
End Page
6
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/21354
DOI
10.1088/0957-4484/27/48/485203
ISSN
0957-4484
1361-6528
Abstract
For the double MgO based perpendicular magnetic tunneling junction (p-MTJ) spin-valves with a top Co2Fe6B2 free layer ex situ annealed at 400 degrees C, the tunneling-magnetoresistance ratio (TMR) strongly depended on the platinum (Pt) seed layer thickness (t(Pt)): it peaked (similar to 134%) at a specific t(Pt) (3.3 nm). The TMR ratio was initially and slightly increased from 113%-134% by the enhancement of the magnetic moment of the Co2Fe6B2 pinned layer when tPt increased from 2.0-3.3 nm, and then rapidly decreased from 134%-38.6% by the degrading face-centered-cubic crystallinity of the MgO tunneling barrier when tPt increased from 3.3-14.3 nm.
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