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Inorganic- organic hybrid thin film as inhibitor in area-selective atomic layer deposition
- Authors
- 성명모
- Issue Date
- 12-Feb-2025
- Conference Name
- 제 32회 한국반도체학술대회
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Collections - 서울 자연과학대학 > 서울 화학과 > 2. Conference Papers
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Related Researcher
- Sung, Myung Mo
- COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF CHEMISTRY)