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Investigation of Plasma Potential in Dual-Frequency (2, 27.12 MHz) Inductively Coupled Plasma Using a Circuit Mode
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2026-06-22T07:02:47Z | - |
| dc.date.available | 2026-06-22T07:02:47Z | - |
| dc.date.issued | 2025-06-12 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/214031 | - |
| dc.title | Investigation of Plasma Potential in Dual-Frequency (2, 27.12 MHz) Inductively Coupled Plasma Using a Circuit Mode | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 4th International Symposium on the Physics of Semiconductors and Applications | - |
| dc.citation.conferencePlace | DDC(Daejeon Convention Center) | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)