Shape Optimization for One-valve Type of a Ceramic Porous Chuck

Abstract

Flexible film is a principal component in the semiconductor or display industry, so that it must be inspected for defects such as flatness and scratch. The flexible film should be attached on the ceramic porous plate by adsorption of the chuck for inspection. This paper proposes flexible film simulation and shape optimization methods to obtain an optimal internal shape of a one-valve type ceramic porous chuck for remedying the flexible film crumpling, productivity reduction. In order to obtain an optimal internal shape, flexible film simulation and fluid-solid interface analysis using particle method is performed, and shape optimization technique is also employed. In the simulation, we could simulated the flexible film crumpling phenomenon due to adsorption speed and displacement of each part of the flexible film