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Nitrogen Doping via PEALD to Suppress Crystallization of In-rich IGO for High-Performance TFTs
- Authors
- 박진성
- Issue Date
- 11-Dec-2025
- Place
- 부산 벡스코
- Conference Name
- ICAMD2025
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)