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다층박막형 흡수체 구조를 사용한 극자외선 노광공정용 위상변위 마스크 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-02T16:00:36Z | - |
| dc.date.available | 2021-08-02T16:00:36Z | - |
| dc.date.issued | 2019-02-15 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/21790 | - |
| dc.title | 다층박막형 흡수체 구조를 사용한 극자외선 노광공정용 위상변위 마스크 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | The 26th Korean Conference on Semiconductors | - |
| dc.citation.conferencePlace | 강원도 웰리힐리파크 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)