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Controlled Oxide State Design for High-Performance Cobalt Chemical Mechanical Planarization
- Authors
- 백운규
- Issue Date
- 29-Apr-2026
- Place
- Sheraton Waikiki Beach Resort, Hawaii, USA
- Conference Name
- 2026 MRS Spring Meeting & Exhibit
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)