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RF 바이어스가 인가된 유도 결합 플라즈마의 웨이퍼 위치 플라즈마 공간 분포 진단
- Authors
- 정진욱
- Issue Date
- 9-Feb-2026
- Place
- Sono Calm Vivaldi Park, Hongcheon, Gangwon-do, Republic of Korea
- Conference Name
- 제 70회 한국 진공학회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)