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He 준안정종의 선택적 생성을 통한 O 라디칼 밀도 제어 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2026-07-06T07:05:52Z | - |
| dc.date.available | 2026-07-06T07:05:52Z | - |
| dc.date.issued | 2026-02-09 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/218070 | - |
| dc.title | He 준안정종의 선택적 생성을 통한 O 라디칼 밀도 제어 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제 70회 한국 진공학회 | - |
| dc.citation.conferencePlace | Sono Calm Vivaldi Park, Hongcheon, Gangwon-do, Republic of Korea | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)