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산소 플라즈마에서 전자 밀도 및 균일도 향상을 위한 질소 첨가 효과
- Authors
- 정진욱
- Issue Date
- 22-Aug-2025
- Place
- Phoenix Island, Jeju, Korea
- Conference Name
- 제69회 한국진공학회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)