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La(NO3)3·6H2O 용액을 산화제로 이용한 HfO2 박막의 미세 구조

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dc.contributor.author안진호-
dc.date.accessioned2021-08-02T16:00:44Z-
dc.date.available2021-08-02T16:00:44Z-
dc.date.issued2019-02-14-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/21816-
dc.titleLa(NO3)3·6H2O 용액을 산화제로 이용한 HfO2 박막의 미세 구조-
dc.typeConference-
dc.citation.conferenceNameThe 26th Korean Conference on Semiconductors-
dc.citation.conferencePlace강원도 웰리힐리파크-
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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