ConferenceIssue Date2013Citation5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and NanomaterialsPublisherAichi Science & Technology FoundationPlaceNagoya University, Japan
ConferenceIssue Date2013Citation5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and NanomaterialsPublisherAichi Science & Technology FoundationPlaceNagoya University, Japan