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Enhancing EUV mask imaging performance through aerial image optimization

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ConferenceIssue Date2021Place일산 KINTEX / 온라인 개최
Actinic mask imaging using EUV ptychography microscope

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ConferenceIssue Date2021Place일산 KINTEX / 온라인 개최
Investigation of particle impact on thermo-mechanical behavior of EUV pellicle

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ConferenceIssue Date2021Place곤지암리조트
Fabrication and evaluation of Ni-based high-k mask for high numerical aperture extreme ultraviolet lithography

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ConferenceIssue Date2021Place곤지암리조트
Effect of reflected EUV light by the wrinkled pellicle

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ConferenceIssue Date2021Place곤지암리조트
The verification of relationship between resistivity and thermal emissivity of EUV pellicle

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ConferenceIssue Date2021Place곤지암리조트
Enabling enhanced EUV mask imaging performance through aerial image optimization

안진호

ConferenceIssue Date2021Place곤지암리조트
Actinic mask imaging using EUV ptychography microscope

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ConferenceIssue Date2021Place곤지암리조트
EUV mask technology

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ConferenceIssue Date2023Place벨기에
Metal silicide EUV pellicle and the Effect of Wrinkles on Mask-3D Effects

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ConferenceIssue Date2023Place벨기에
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