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Dynamics of Threshold Voltage Instability in IGZO TFTs: Impact of High Pressurized Oxygen Treatment on the Activation Energy Barrier

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dc.contributor.authorSong, Ji Hun-
dc.contributor.authorOh, Nuri-
dc.contributor.authorAnh, Byung Du-
dc.contributor.authorKim, Hye Dong-
dc.contributor.authorJeong, Jae Kyeong-
dc.date.accessioned2021-08-02T17:27:29Z-
dc.date.available2021-08-02T17:27:29Z-
dc.date.issued2016-03-
dc.identifier.issn0018-9383-
dc.identifier.issn1557-9646-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/23913-
dc.description.abstractThe effect of oxygen high pressurized treatment (OHPT) on the gate-bias thermal stress (BTS) instability of amorphous indium-gallium-zinc-oxide (IGZO) TFTs was investigated. OHPT at 10 atm and 300 degrees C produces TFTs with better reliability under the positive/negative BTS conditions, which can be attributed to the reduction in the oxygen vacancy defect. However, OHPT at a higher pressure (15 atm) deteriorated the BTS-induced stability of the IGZO TFTs. The rationale for this strong OHPT dependence on the BTS instability of IGZO TFTs was discussed based on the single-frame oxygen-related defect model.-
dc.format.extent5-
dc.language영어-
dc.language.isoENG-
dc.publisherInstitute of Electrical and Electronics Engineers-
dc.titleDynamics of Threshold Voltage Instability in IGZO TFTs: Impact of High Pressurized Oxygen Treatment on the Activation Energy Barrier-
dc.typeArticle-
dc.publisher.location미국-
dc.identifier.doi10.1109/TED.2015.2511883-
dc.identifier.scopusid2-s2.0-84957639557-
dc.identifier.wosid000372356900022-
dc.identifier.bibliographicCitationIEEE Transactions on Electron Devices, v.63, no.3, pp 1054 - 1058-
dc.citation.titleIEEE Transactions on Electron Devices-
dc.citation.volume63-
dc.citation.number3-
dc.citation.startPage1054-
dc.citation.endPage1058-
dc.type.docTypeArticle-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClasssci-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaEngineering-
dc.relation.journalResearchAreaPhysics-
dc.relation.journalWebOfScienceCategoryEngineering, Electrical & Electronic-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.subject.keywordPlusTHIN-FILM TRANSISTORS-
dc.subject.keywordAuthorAmorphous indium-gallium-zinc-oxide (a-IGZO)-
dc.subject.keywordAuthorinstability-
dc.subject.keywordAuthorinterstitial oxygen-
dc.subject.keywordAuthoroxygen vacancy-
dc.subject.keywordAuthorTFT-
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