구리 나노입자의 광소결에 의한 기판의 휨 현상 저감 연구
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 유충현 | - |
dc.contributor.author | 김학성 | - |
dc.date.accessioned | 2021-08-02T18:28:27Z | - |
dc.date.available | 2021-08-02T18:28:27Z | - |
dc.date.created | 2021-05-13 | - |
dc.date.issued | 2014-11 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/25722 | - |
dc.description.abstract | A study to reduce the substrate warpage on flash light sintering for copper nanoparticles was investigated. In order to minimize the substrate warpage, two-step flash light sintering method was performed. The flash light sintering process was divided into a preheating step and a main sintering step. To find the optimum sintering conditions of copper nanoparticles, the flash light conditions (irradiation energy, pulse number, on-time and off-time) was varied. The microstructures and transformation crystal phase of the sintered copper nanofilms were analyzed by scanning electron microscopy. In addition, the sheet resistance was measured using a four-point probe method. Also, the thickness of copper nanofilms was measured by alpha-step. From these results, it is found that the flash light sintered copper nanofilms have a low resistivity without any damage to the thin polyimide substrate. | - |
dc.language | 한국어 | - |
dc.language.iso | ko | - |
dc.publisher | 대한기계학회 | - |
dc.title | 구리 나노입자의 광소결에 의한 기판의 휨 현상 저감 연구 | - |
dc.title.alternative | A study to reduce the substrate warpage on flash light sintering for copper nanoparticles | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | 김학성 | - |
dc.identifier.bibliographicCitation | 대한기계학회 2014년도 추계학술대회, pp.561 - 565 | - |
dc.relation.isPartOf | 대한기계학회 2014년도 추계학술대회 | - |
dc.citation.title | 대한기계학회 2014년도 추계학술대회 | - |
dc.citation.startPage | 561 | - |
dc.citation.endPage | 565 | - |
dc.type.rims | ART | - |
dc.type.docType | Proceeding | - |
dc.description.journalClass | 3 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | other | - |
dc.subject.keywordAuthor | Flash light sintering(광소결) | - |
dc.subject.keywordAuthor | Two-step sintering process(2단계 소결 공정) | - |
dc.subject.keywordAuthor | Warpage(휨) | - |
dc.subject.keywordAuthor | Copper nanoparticles(구리 나노 입자) | - |
dc.identifier.url | https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE06069357 | - |
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