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Effect of Polystyrene-Sulfonate Surfactant on Reduction of Remaining Abrasives and Surface Roughness in Tungsten-Film Chemical-Mechanical-Polishing
- Authors
- 박재근
- Issue Date
- 1-Oct-2018
- Place
- Moon Palace Resort, Cancun
- Conference Name
- 2018 AiMES
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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