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백금을 활용한 고 개구수 극자외선 노광공정용 위상변위 마스크 제작 및 성능 평가
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-02T19:03:37Z | - |
| dc.date.available | 2021-08-02T19:03:37Z | - |
| dc.date.issued | 2018-08-21 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/27310 | - |
| dc.title | 백금을 활용한 고 개구수 극자외선 노광공정용 위상변위 마스크 제작 및 성능 평가 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2018 Conference on Next Generation Lithography | - |
| dc.citation.conferencePlace | 인천 송도 컨벤션센터 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)