Vibration sensitivity analysis of MEMS vibratory ring gyroscopes
- Authors
- Yoon, Sang Won; Lee, Sangwoo; Najafi, Khalil
- Issue Date
- Nov-2011
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- Vibration sensitivity; Ring gyroscopes; Gyroscope modeling; Lagrange' s equations; Translation modes; Flexural modes
- Citation
- SENSORS AND ACTUATORS A-PHYSICAL, v.171, no.2, pp.163 - 177
- Indexed
- SCIE
SCOPUS
- Journal Title
- SENSORS AND ACTUATORS A-PHYSICAL
- Volume
- 171
- Number
- 2
- Start Page
- 163
- End Page
- 177
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/27663
- DOI
- 10.1016/j.sna.2011.08.010
- ISSN
- 0924-4247
- Abstract
- This paper presents a detailed model for possible vibration effects on MEMS degenerate gyroscopes represented by vibratory ring gyroscopes. Ring gyroscopes are believed to be relatively vibration-insensitive because the vibration modes utilized during gyro operation are decoupled from the modes excited by environmental vibration. Our model incorporates four vibration modes needed to describe vibration-induced errors: two flexural modes (for gyro operation) and two translation modes (excited by external vibration). The four-mode dynamical model for ring gyroscopes is derived using Lagrange's equations. The model considers all elements comprising a ring gyroscope, namely the ring structure, the support-spring structures, and the electrodes that surround the ring structure. Inspection of this model demonstrates that the output of a ring gyroscope is fundamentally insensitive to vibration due to the decoupled dynamics governing ring translation versus ring flexure, however, becomes vibration-sensitive in the presence of non-proportional damping and/or capacitive nonlinearity at the sense electrodes. (C) 2011 Elsevier By. All rights reserved.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 미래자동차공학과 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/27663)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.