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Design and modeling of a microwave plasma enhanced chemical vapor deposition system
- Authors
- Ming-Chieh Lin
- Issue Date
- 25-Jun-2018
- Publisher
- IEEE
- Citation
- The 45th IEEE International Conference on Plasma Science (ICOPS 2018)
- Conference Name
- The 45th IEEE International Conference on Plasma Science (ICOPS 2018)
- Place
- Denver, CO, USA
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Lin, Ming Chieh
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)