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Characteristics of Si doped ZrO2 deposited by ALD for DRAM capacitor
- Authors
- 전형탁
- Issue Date
- 19-Mar-2018
- Place
- Hotel Four Points Sheraton Milano Center
- Conference Name
- MAM 2018
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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