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Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진성 | - |
| dc.date.accessioned | 2021-08-02T22:27:40Z | - |
| dc.date.available | 2021-08-02T22:27:40Z | - |
| dc.date.issued | 2017-11-24 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/29955 | - |
| dc.title | Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 반도체 디스플레이 공정, 장비 및 소재 신기술 동향 | - |
| dc.citation.conferencePlace | 경기도 수원시 성균관대학교 자연과학캠퍼스 | - |
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)