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Polystyrene-sulfonate Surfactant Effect on Tungsten-film Chemical-mechanical-polishing Properties Improvement in Buried-tungsten-gate Formation of 1X-nm DRAM
- Authors
- 박재근
- Issue Date
- 22-Nov-2017
- Place
- SUMCO Kyushu Factory (Imari)
- Conference Name
- 7th International Symposium for Advanced Functional Materials & Devices
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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