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전기적 특성 평가를 통한 Nano-Trench Patterned Si Wafer의 건식 세정 효과 분석
- Authors
- 최창환
- Issue Date
- 16-Nov-2017
- Place
- 경주
- Conference Name
- 한국재료학회 추계학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)