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Influence of Oxygen Profile in ALD HfO2-x Thin Films on Non-Volatile Resistive Switching Behaviors with a Ti/HfOx/Pt Structure

Authors
최창환
Issue Date
3-Jul-2017
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/31907
Place
Gyeongju, Korea
Conference Name
Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Device (AWAD)
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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