Detailed Information

Cited 4 time in webofscience Cited 4 time in scopus
Metadata Downloads

Improved reliability of breakdown voltage measurement of yttrium oxide coatings by plasma spray

Authors
Song, Je-BoemChoi, EunmiOh, Seong-GeunSo, JonghoLee, Seung-SuKim, Jin-TaeYun, Ju-Young
Issue Date
Dec-2019
Publisher
ELSEVIER SCI LTD
Keywords
Breakdown voltage; Plasma arcing; Atmospheric plasma spray coating; Suspension plasma spray coating; Anodizing
Citation
CERAMICS INTERNATIONAL, v.45, no.17, pp.22169 - 22174
Indexed
SCIE
SCOPUS
Journal Title
CERAMICS INTERNATIONAL
Volume
45
Number
17
Start Page
22169
End Page
22174
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/32798
DOI
10.1016/j.ceramint.2019.07.238
ISSN
0272-8842
Abstract
Understanding the dielectric breakdown voltage of coatings inside plasma equipment is important for improving the reliability of semiconductor processes. Measurements of breakdown voltage can vary owing to many factors, but the measurement itself has not yet been studied systematically. In this paper, we designed two type tools to measure the breakdown voltage. We decided to use a one-electrode method with a 20 mm(2) electrode and chose to apply the voltage at 15 V/s to minimise measurement error. We used these tools to systematically evaluate the breakdown voltages of different coatings deposited using various methods. Coatings deposited using suspension plasma spraying had a higher breakdown voltage than coatings deposited using atmospheric plasma spraying, because suspension plasma spraying films can be deposited at high density, minimizing electrical stress. As the fluorine content in the coating increased, it is widely used for material of excellent etching resistance in fluorine plasma etching. However, dielectric breakdown voltage decreased with increasing fluorine content, which could affect process reliability.
Files in This Item
Go to Link
Appears in
Collections
서울 공과대학 > 서울 화학공학과 > 1. Journal Articles

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Oh, Seong-Geun photo

Oh, Seong-Geun
COLLEGE OF ENGINEERING (DEPARTMENT OF CHEMICAL ENGINEERING)
Read more

Altmetrics

Total Views & Downloads

BROWSE