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Graphene을 포함한 복합구조체 EUV 펠리클의 광학적, 기계적 특성 분석
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-03T03:29:08Z | - |
| dc.date.available | 2021-08-03T03:29:08Z | - |
| dc.date.issued | 2017-04-27 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/33085 | - |
| dc.title | Graphene을 포함한 복합구조체 EUV 펠리클의 광학적, 기계적 특성 분석 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국반도체디스플레이기술학회 2017년 춘계학술대회 | - |
| dc.citation.conferencePlace | 경북대학교 IT융합산업빌딩(115호관) 대회의실(대구광역시) | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)