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Reduction of interface trap in poly-Si channel for 3D NAND device through dielectric recovery process
- Authors
- 김은규
- Issue Date
- 20-Apr-2017
- Publisher
- Materials Research Society
- Citation
- Materials Research Society 2017 Spring Meeting
- Conference Name
- Materials Research Society 2017 Spring Meeting
- Place
- Phoenix, Arizona
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Collections - 서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers
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