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Atomic Layer Deposited Gate Spacer for New Memory Devices
- Authors
- 전형탁
- Issue Date
- 16-Nov-2016
- Place
- 경주
- Conference Name
- 한-일 재료공학 심포지엄
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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