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THz-TDS 시스템을 이용한 P-N type 실리콘 웨이퍼 도핑 농도와 물리적 특성 측정
- Authors
- 김학성
- Issue Date
- 3-Nov-2016
- Conference Name
- 2016 추계학술대회 및 제36차 정기총회
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Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
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Related Researcher
- Kim, Hak Sung
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)