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Annihilation of Threading Dislocation in Strain-Relaxed Si1-xGex Layer by Hydrogen Ion Implantation
- Authors
- 박재근
- Issue Date
- 7-Oct-2016
- Place
- Hawaii Convention Center and the Hilton Hawaiian Village
- Conference Name
- 230th ECS Meeting
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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