Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Remote plasma ALD of Silicon Nitride and Silicon Oxycarbide
- Authors
- 전형탁
- Issue Date
- 19-Sep-2016
- Place
- 폴란드 바르샤바
- Conference Name
- 2016 EMRS Fall
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.