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Characterization of High Pressure Hydrogen Annealing Effect on Polysilicon Channel Field Effect Transistors using Isothermal Deep Level Trap Spectroscopy

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dc.contributor.author최창환-
dc.date.accessioned2021-08-03T06:18:26Z-
dc.date.available2021-08-03T06:18:26Z-
dc.date.issued2016-06-28-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/36110-
dc.titleCharacterization of High Pressure Hydrogen Annealing Effect on Polysilicon Channel Field Effect Transistors using Isothermal Deep Level Trap Spectroscopy-
dc.typeConference-
dc.citation.conferenceNameIEEE International Conference on IC Design and Technology (ICICDT)-
dc.citation.conferencePlaceHo Chi Minh City, Vietnam-
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