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NH3 Pre-Plasma Treatment to Reduce Interface State Density of GaN MOS Device

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dc.contributor.author최창환-
dc.date.accessioned2021-08-03T06:28:47Z-
dc.date.available2021-08-03T06:28:47Z-
dc.date.created2021-06-30-
dc.date.issued2016-05-19-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/36606-
dc.publisher한국재료학회-
dc.titleNH3 Pre-Plasma Treatment to Reduce Interface State Density of GaN MOS Device-
dc.typeConference-
dc.contributor.affiliatedAuthor최창환-
dc.identifier.bibliographicCitation한국재료학회 춘계학술대회-
dc.relation.isPartOf한국재료학회 춘계학술대회-
dc.citation.title한국재료학회 춘계학술대회-
dc.citation.conferencePlace여수 디오션리조트-
dc.type.rimsCONF-
dc.description.journalClass2-
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