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Contamination of heated wafers in a hexahedron container due to mass transfer of particles

Authors
육세진
Issue Date
14-Mar-2016
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/37401
Place
Hawaii, U.S.A.
Conference Name
The First Pacific Rim Thermal Engineering Conference
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서울 공과대학 > 서울 기계공학부 > 2. Conference Papers

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COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)
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