Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Spatial distribution of floating potential at wafer level in electronegative plasma
- Authors
- 정진욱
- Issue Date
- 9-Mar-2016
- Publisher
- The Japan Society of Applied Physics
- Citation
- ISPlasma2016/IC-PLANTS2017
- Conference Name
- ISPlasma2016/IC-PLANTS2017
- Place
- Nagoya University, Nagoya, Japan
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)